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Fabrication Process for Cantilever Beam Micromechanical Switches.

作者:科技文献资料网 时间:2018-10-15 17:08:43  浏览:9486   来源:科技文献资料网
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[文献类型]:科技报告
[标题]:Fabrication Process for Cantilever Beam Micromechanical Switches.
[作者]:mermagen, t. j. rod, b. j.
[机构]:Army Research Lab.,Adelphi,MD.
[关键词]:accelerometers,cantilever beams,fabrication,switches,safing and arming(ordnance),gold,integrated circuits,nickel,processing,silicon,structures,substrates,micromechanics,detectors,metals,machining,micromachining,thrust area 7,ntisdodxa
[出版年份]:1994
[报告号]:Rept no. ARL-MR-96
[报告时间]:Aug 93,
[页码]:22p
[馆藏索取号]:AD-A269716
[总页数]:19


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[唯一标识符]:CDSTIC.ISTP.594369
[文献来源]:科学技术会议录索引(ISTP)
[文献类型]:科技会议
[标题]:ENERGETIC BOTTLENECKS AND OTHER DESIGN CONSTRAINTS IN AVIAN ANNUAL CYCLES
[作者]:T PIERSMA
[出版单位]:SOC INTEGRATIVE COMPARATIVE BIOLOGYMCLEAN
[ISSN_ISBN]:1540-7063
[会议名称]:Annual Meeting of the Society-for-Integrative-and-Comparative-Biology,CHICAGO, IL,January 3-7, 2001
[来源]:AMERICAN ZOOLOGIST;AMERICAN ZOOLOGIST;INTEGRATIVE AND COMPARATIVE BIOLOGY;INTEGRATIVE AND COMPARATIVE BIOLOGY;INTEGRATIVE AND COMPARATIVE BIOLOGY,pp 51-67
[主办单位]:Soc Integrat & Comparat Biol
[地址]:T PIERSMA,NETHERLANDS_INST_SEA_RES, NIOZ, POB 59, NL-1790 AB DEN BURG, NETHERLANDS
[专业领域]:ZOOLOGY
[文献类型]:科技报告
[标题]:Nastran Benefits Analysis. Volume 2Final Technical Report.
[机构]:Computer Sciences Corp.,Falls Church,Va.
[关键词]:computer programming,nasa programs,structural analysis,cost analysis,technology transfer, T
[出版年份]:1972
[报告号]:NASA-CR-125883
[报告时间]:15Feb 72,
[页码]:248p
[馆藏索取号]:N72-20902
[总页数]:161



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